Issued Patents 2020
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768532 | Co-optimization of lithographic and etching processes with complementary post exposure bake by laser annealing | Jing Sha, Ekmini Anuja De Silva, Nelson Felix | 2020-09-08 |
| 10725454 | Mask process aware calibration using mask pattern fidelity inspections | Ravi K. Bonam, Nicole Saulnier, Michael M. Crouse | 2020-07-28 |
| 10706200 | Generative adversarial networks for generating physical design layout patterns of integrated multi-layers | Jing Sha, Michael A. Guillorn, Martin Burkhardt | 2020-07-07 |
| 10699055 | Generative adversarial networks for generating physical design layout patterns | Jing Sha, Michael A. Guillorn, Martin Burkhardt | 2020-06-30 |
| 10678971 | Space exploration with Bayesian inference | Jing Sha, Dongbing Shao | 2020-06-09 |
| 10657420 | Modeling post-lithography stochastic critical dimension variation with multi-task neural networks | Jing Sha, Ekmini Anuja De Silva | 2020-05-19 |
| 10650111 | Electrical mask validation | Daniel A. Corliss, Michael A. Guillorn, Shawn P. Fetterolf | 2020-05-12 |
| 10621301 | Coordinates-based variational autoencoder for generating synthetic via layout patterns | Jing Sha, Michael A. Guillorn | 2020-04-14 |
| 10606975 | Coordinates-based generative adversarial networks for generating synthetic physical design layout patterns | Jing Sha, Michael A. Guillorn | 2020-03-31 |
| 10599807 | Automatic generation of via patterns with coordinate-based recurrent neural network (RNN) | Jing Sha, Michael A. Guillorn | 2020-03-24 |
| 10592635 | Generating synthetic layout patterns by feedforward neural network based variational autoencoders | Jing Sha, Michael A. Guillorn | 2020-03-17 |
| 10579764 | Co-modeling post-lithography critical dimensions and post-etch critical dimensions with multi-task neural networks | Jing Sha, Ekmini Anuja De Silva | 2020-03-03 |