Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840060 | Scanning electron microscope and sample observation method | Zhaohui Cheng, Hikaru Koyama, Yoshinobu Kimura, Hiroyuki Shinada | 2020-11-17 |
| 10545017 | Overlay error measuring device and computer program for causing computer to measure pattern | Satoru Yamaguchi, Kei Sakai, Osamu Inoue, Kazuyuki Hirao | 2020-01-28 |