Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665420 | Charged particle beam apparatus | Yasunori Takasugi, Satoru Yamaguchi, Hideki ITAI, Yoshinori Momonoi, Toshimasa Kameda +1 more | 2020-05-26 |
| 10620421 | Image-forming device, and dimension measurement device | Yasunori Takasugi, Satoru Yamaguchi, Kazuyuki Hirao | 2020-04-14 |
| 10545017 | Overlay error measuring device and computer program for causing computer to measure pattern | Satoru Yamaguchi, Osamu Inoue, Kazuyuki Hirao, Osamu Komuro | 2020-01-28 |