Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10545017 | Overlay error measuring device and computer program for causing computer to measure pattern | Satoru Yamaguchi, Kei Sakai, Kazuyuki Hirao, Osamu Komuro | 2020-01-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10545017 | Overlay error measuring device and computer program for causing computer to measure pattern | Satoru Yamaguchi, Kei Sakai, Kazuyuki Hirao, Osamu Komuro | 2020-01-28 |