Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840060 | Scanning electron microscope and sample observation method | Hikaru Koyama, Yoshinobu Kimura, Hiroyuki Shinada, Osamu Komuro | 2020-11-17 |
| 10727024 | Charged particle beam device and aberration correction method for charged particle beam device | Kotoko Urano, Takeyoshi Ohashi, Hideyuki Kazumi | 2020-07-28 |