Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10688622 | Substrate processing apparatus | Hiroshi Aono, Kuniaki Yamaguchi, Hiroshi Shimomoto, Koji Maeda, Tetsuya Yashima +5 more | 2020-06-23 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima +6 more | 2020-02-25 |
| 10562182 | Robot, robot system, control device, and control method | Tomoki Harada, Shogo ARAI | 2020-02-18 |