Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10737937 | Sensor characteristic evaluation method and charged particle beam device | Toshiyuki Mine, Koji Fujisaki, Masaharu Kinoshita, Masatoshi Morishita, Daisuke Ryuzaki | 2020-08-11 |
| 10662059 | Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus | Hiroyasu Shichi, Misuzu Sagawa, Toshiyuki Mine, Daisuke Ryuzaki | 2020-05-26 |
| 10605824 | MEMS manufacturing method and MEMS manufacturing apparatus | Shuntaro Machida, Nobuyuki Sugii, Daisuke Ryuzaki, Tetsufumi Kawamura, Kazuki Watanabe | 2020-03-31 |
| 10549989 | Microstructure manufacturing method and ION beam apparatus | Hiroyasu Shichi, Daisuke Ryuzaki | 2020-02-04 |
| 10546721 | Microstructure manufacturing method and microstructure manufacturing apparatus | Hiroyasu Shichi, Daisuke Ryuzaki | 2020-01-28 |