Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10737937 | Sensor characteristic evaluation method and charged particle beam device | Toshiyuki Mine, Keiji Watanabe, Masaharu Kinoshita, Masatoshi Morishita, Daisuke Ryuzaki | 2020-08-11 |
| 10557058 | Polishing agent, polishing agent set, and substrate polishing method | Toshiaki Akutsu, Hisataka Minami, Tomohiro Iwano | 2020-02-11 |
| 10557059 | Slurry, polishing-solution set, polishing solution, substrate polishing method, and substrate | Tomohiro Iwano, Hisataka Minami, Toshiaki Akutsu | 2020-02-11 |
| 10549399 | Slurry, polishing-solution set, polishing solution, substrate polishing method, and substrate | Tomohiro Iwano, Hisataka Minami, Toshiaki Akutsu | 2020-02-04 |