Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840070 | Ion beam device and cleaning method for gas field ion source | Yoshimi Kawanami, Atsushi Kobaru, Tomihiro Hashizume, Shinichi Matsubara | 2020-11-17 |
| 10662059 | Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus | Keiji Watanabe, Misuzu Sagawa, Toshiyuki Mine, Daisuke Ryuzaki | 2020-05-26 |
| 10651006 | Ion beam apparatus | Shinichi Matsubara, Yoshimi Kawanami | 2020-05-12 |
| 10636623 | Ion beam device | Shinichi Matsubara, Yoshimi Kawanami, Hiroyuki Muto | 2020-04-28 |
| 10549989 | Microstructure manufacturing method and ION beam apparatus | Keiji Watanabe, Daisuke Ryuzaki | 2020-02-04 |
| 10546721 | Microstructure manufacturing method and microstructure manufacturing apparatus | Keiji Watanabe, Daisuke Ryuzaki | 2020-01-28 |