Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10662059 | Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus | Keiji Watanabe, Hiroyasu Shichi, Toshiyuki Mine, Daisuke Ryuzaki | 2020-05-26 |
| 10538429 | MEMS manufacturing system and MEMS manufacturing method | Atsushi Isobe | 2020-01-21 |