Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10599052 | Vacuum system, in particular EUV lithography system, and optical element | Matthias Roos | 2020-03-24 |
| 10585356 | Projection exposure apparatus and method for measuring a projection lens | Frank Leonard Schadt, III, Uwe Hempelmann, Frank Schleicher | 2020-03-10 |