Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585356 | Projection exposure apparatus and method for measuring a projection lens | Eugen Foca, Uwe Hempelmann, Frank Schleicher | 2020-03-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585356 | Projection exposure apparatus and method for measuring a projection lens | Eugen Foca, Uwe Hempelmann, Frank Schleicher | 2020-03-10 |