UH

Uwe Hempelmann

CG Carl Zeiss Smt Gmbh: 1 patents #59 of 200Top 30%
Overall (2020): #235,458 of 565,922Top 45%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10585356 Projection exposure apparatus and method for measuring a projection lens Eugen Foca, Frank Leonard Schadt, III, Frank Schleicher 2020-03-10