Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10599052 | Vacuum system, in particular EUV lithography system, and optical element | Eugen Foca | 2020-03-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10599052 | Vacuum system, in particular EUV lithography system, and optical element | Eugen Foca | 2020-03-24 |