Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854423 | Multi-beam particle beam system | Yanko Sarov, Jan Horn, Ulrich Bihr, Erik Essers | 2020-12-01 |
| 10811215 | Charged particle beam system | Dirk Zeidler, Stefan Schubert, Ingo Mueller, Joerg Jacobi, Mario Muetzel +1 more | 2020-10-20 |
| 10741355 | Multi-beam charged particle system | Dirk Zeidler, Thomas Kemen, Ralf Lenke, Joerg Jacobi | 2020-08-11 |
| 10600613 | Particle beam system | Dirk Zeidler, Thomas Kemen, Ralf Lenke | 2020-03-24 |