Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854423 | Multi-beam particle beam system | Jan Horn, Ulrich Bihr, Christof Riedesel, Erik Essers | 2020-12-01 |
| 10761317 | Device for swiveling a mirror element with two degrees of swiveling freedom | Markus Hauf | 2020-09-01 |