Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854423 | Multi-beam particle beam system | Yanko Sarov, Ulrich Bihr, Christof Riedesel, Erik Essers | 2020-12-01 |
| 10678151 | Control device | Markus Holz, Klaus Syrowatka | 2020-06-09 |