Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811215 | Charged particle beam system | Dirk Zeidler, Stefan Schubert, Ingo Mueller, Mario Muetzel, Antonio Casares +1 more | 2020-10-20 |
| 10741355 | Multi-beam charged particle system | Dirk Zeidler, Thomas Kemen, Christof Riedesel, Ralf Lenke | 2020-08-11 |