TM

Takashi Minakawa

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #254,356 of 565,922Top 45%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10832892 Antenna, plasma processing device and plasma processing method Kazuki Takahashi, Yuki KAWADA, Naoki Matsumoto, Takahiro Senda, Koji Koyama +3 more 2020-11-10