Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818537 | Substrate transport apparatus | Robert T. Caveney | 2020-10-27 |
| 10777438 | Processing apparatus | Robert T. Caveney | 2020-09-15 |
| 10742092 | Position feedback for sealed environments | Jairo T. Moura, Reza Saeidpourazar, Branden Gunn, Matthew W. Coady | 2020-08-11 |
| 10679882 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, William J. Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2020-06-09 |
| 10600665 | Substrate processing apparatus | Robert T. Caveney, Jayaraman Krishnasamy, Mitchell Drew, Jairo T. Moura | 2020-03-24 |
| 10556351 | Transport apparatus | Jairo T. Moura | 2020-02-11 |