Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854478 | Load lock fast pump vent | Christopher Hofmeister, Martin R. Elliott, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus +3 more | 2020-12-01 |
| 10815057 | Universal gripper for tote and sub-tote transport | Martin R. Elliott, John G. Lert, Jr. | 2020-10-27 |
| 10818528 | Self-contained metrology wafer carrier systems | Abner Bello, Stephanie Waite, Thomas Beeg | 2020-10-27 |
| 10707108 | Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication | Stephanie Waite, Stephen B. Miner, John Robinson | 2020-07-07 |
| 10679882 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2020-06-09 |
| 10593575 | System and method for monitoring wafer handling and a wafer handling machine | Stephen B. Miner, Ryan John Gallagher | 2020-03-17 |
| 10541157 | Load lock fast pump vent | Christopher Hofmeister, Martin R. Elliott, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus +3 more | 2020-01-21 |