Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818528 | Self-contained metrology wafer carrier systems | Abner Bello, William J. Fosnight, Thomas Beeg | 2020-10-27 |
| 10707108 | Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication | William J. Fosnight, Stephen B. Miner, John Robinson | 2020-07-07 |