Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10843341 | Method and apparatus for health assessment of a transport apparatus | Aaron Gawlik | 2020-11-24 |
| 10770325 | Tool auto-teach method and apparatus | Aaron Gawlik, Reza Saeidpourazar | 2020-09-08 |
| 10742092 | Position feedback for sealed environments | Reza Saeidpourazar, Branden Gunn, Matthew W. Coady, Ulysses Gilchrist | 2020-08-11 |
| 10651067 | Method and apparatus for substrate transport apparatus position compensation | Robert T. Caveney, Bing Yin, Nathan Spiker, Vincent W. Tsang | 2020-05-12 |
| 10600665 | Substrate processing apparatus | Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew | 2020-03-24 |
| 10564221 | Method and apparatus for brushless electrical machine control | Nathan Spiker, Aaron Gawlik, Jayaraman Krishnasamy | 2020-02-18 |
| 10556351 | Transport apparatus | Ulysses Gilchrist | 2020-02-11 |