Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818537 | Substrate transport apparatus | Ulysses Gilchrist | 2020-10-27 |
| 10777438 | Processing apparatus | Ulysses Gilchrist | 2020-09-15 |
| 10748799 | Substrate transport apparatus with interchangeable motor modules | — | 2020-08-18 |
| 10737381 | Dual arm robot | Alexander Krupyshev, Martin R. Elliot, Christopher Hofmeister | 2020-08-11 |
| 10661990 | Automated cryogenic storage system | Frank Hunt, Lingchen Sun, Julian Warhurst, Bruce S. Zandi, Anthony C. Bonora | 2020-05-26 |
| 10651067 | Method and apparatus for substrate transport apparatus position compensation | Jairo T. Moura, Bing Yin, Nathan Spiker, Vincent W. Tsang | 2020-05-12 |
| 10600665 | Substrate processing apparatus | Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura | 2020-03-24 |