Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859919 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Cornelius Maria Rops, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo, Erik Henricus Egidius Catharina Eummelen +3 more | 2020-12-08 |
| 10571810 | Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus | Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelius Paulus Melman +6 more | 2020-02-25 |
| 10551748 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Cornelius Maria Rops, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo, Erik Henricus Egidius Catharina Eummelen +3 more | 2020-02-04 |