Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859919 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Walter Theodorus Matheus STALS, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo, Erik Henricus Egidius Catharina Eummelen +3 more | 2020-12-08 |
| 10551748 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Walter Theodorus Matheus STALS, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo, Erik Henricus Egidius Catharina Eummelen +3 more | 2020-02-04 |