Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845716 | Lithography apparatus and a method of manufacturing a device | Auke Juriaan Been, Victor Manuel Blanco Carballo | 2020-11-24 |
| 10613445 | Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process | Marc Hauptmann, Dylan John David Davies, Paul Janssen, Naoko Tsugama, Richard Joseph Bruls +5 more | 2020-04-07 |
| 10571810 | Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus | Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelius Paulus Melman +6 more | 2020-02-25 |
| 10534270 | Lithography apparatus, a method of manufacturing a device and a control program | Norbertus Josephus Martinus Van Den Nieuwelaar, Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips +7 more | 2020-01-14 |