Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10545410 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Hakki Ergün Cekli, Masashi Ishibashi, Leon Paul VAN DIJK, Richard Johannes Franciscus Van Haren, Xing Lan Liu +2 more | 2020-01-28 |