Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553398 | Power deposition control in inductively coupled plasma (ICP) reactors | Samer Banna, Tza-Jing Gung, Vladimir Knyazik, Kyle Tantiwong, Dan Marohl +1 more | 2020-02-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553398 | Power deposition control in inductively coupled plasma (ICP) reactors | Samer Banna, Tza-Jing Gung, Vladimir Knyazik, Kyle Tantiwong, Dan Marohl +1 more | 2020-02-04 |