Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472717 | Gas supply system, plasma processing apparatus, and operation method for plasma processing apparatus | Atsushi Sawachi, Norikazu Sasaki, Jun Yamashima, Kenichi Nogami | 2019-11-12 |
| 10229844 | Gas supply system, gas supply control method and gas replacement method | Atsushi Sawachi, Norihiko Amikura | 2019-03-12 |