Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424466 | Method for inspecting shower plate of plasma processing apparatus | Risako Miyoshi | 2019-09-24 |
| 10274972 | Method of inspecting gas supply system | Risako Miyoshi | 2019-04-30 |
| 10229844 | Gas supply system, gas supply control method and gas replacement method | Atsushi Sawachi, Yoshiyasu Sato | 2019-03-12 |
| 10168049 | Method for preventing explosion of exhaust gas in decompression processing apparatus | Norikazu Sasaki, Risako Miyoshi | 2019-01-01 |