Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472717 | Gas supply system, plasma processing apparatus, and operation method for plasma processing apparatus | Atsushi Sawachi, Jun Yamashima, Yoshiyasu Sato, Kenichi Nogami | 2019-11-12 |
| 10168049 | Method for preventing explosion of exhaust gas in decompression processing apparatus | Norihiko Amikura, Risako Miyoshi | 2019-01-01 |