Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472717 | Gas supply system, plasma processing apparatus, and operation method for plasma processing apparatus | Atsushi Sawachi, Norikazu Sasaki, Jun Yamashima, Yoshiyasu Sato | 2019-11-12 |