Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473525 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Ching-Ling Meng, Holger Tuitje, Mihail Mihaylov | 2019-11-12 |
| 10453653 | Endpoint detection algorithm for atomic layer etching (ALE) | Xinkang Tian, Jason Ferns | 2019-10-22 |
| 10332861 | Interconnection structures and methods for making the same | Cheng-Heng Kao, Han-Tang Hung, Chun-Hsiang Yang | 2019-06-25 |
| 10205520 | Method and device for measuring optical signal-to-noise ratio | Shuang Chen, Liping Sun, Qianggao Hu, Hui Xie, Qingyan Yue +3 more | 2019-02-12 |