Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473525 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Ching-Ling Meng, Holger Tuitje, Yan Chen | 2019-11-12 |
| 10416430 | Focusing of optical devices | Wojciech Jan Walecki, Jae-myung Ryu | 2019-09-17 |