Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473525 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Ching-Ling Meng, Yan Chen, Mihail Mihaylov | 2019-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473525 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Ching-Ling Meng, Yan Chen, Mihail Mihaylov | 2019-11-12 |