Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473525 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Holger Tuitje, Yan Chen, Mihail Mihaylov | 2019-11-12 |
| 10345246 | Dark field wafer nano-defect inspection system with a singular beam | Xinkang Tian, Yan Sun | 2019-07-09 |