Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453653 | Endpoint detection algorithm for atomic layer etching (ALE) | Yan Chen, Jason Ferns | 2019-10-22 |
| 10345246 | Dark field wafer nano-defect inspection system with a singular beam | Ching-Ling Meng, Yan Sun | 2019-07-09 |