Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429263 | Pressure measuring device and exhaust system using the same, and substrate processing apparatus | Satoshi Kikuchi, Satoru Koike | 2019-10-01 |
| 10287682 | Substrate processing apparatus, gas supply method, substrate processing method, and film forming method | Kazuyuki Kikuchi, Kohei Fukushima | 2019-05-14 |