Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446313 | Electronic component | Mitsugu Kawarai, Satoru Yamada, Tomohiro KAJIYAMA, Juichi Ooki, Motomi Takahashi +1 more | 2019-10-15 |
| 10287682 | Substrate processing apparatus, gas supply method, substrate processing method, and film forming method | Tsuneyuki Okabe, Kohei Fukushima | 2019-05-14 |