Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475641 | Substrate processing apparatus | Hiromi Nitadori | 2019-11-12 |
| 10287682 | Substrate processing apparatus, gas supply method, substrate processing method, and film forming method | Kazuyuki Kikuchi, Tsuneyuki Okabe | 2019-05-14 |