Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429263 | Pressure measuring device and exhaust system using the same, and substrate processing apparatus | Satoshi Kikuchi, Tsuneyuki Okabe | 2019-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429263 | Pressure measuring device and exhaust system using the same, and substrate processing apparatus | Satoshi Kikuchi, Tsuneyuki Okabe | 2019-10-01 |