Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10447118 | Motor apparatus | Kazuyuki Yamamoto | 2019-10-15 |
| 10429263 | Pressure measuring device and exhaust system using the same, and substrate processing apparatus | Tsuneyuki Okabe, Satoru Koike | 2019-10-01 |