Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388544 | Substrate processing apparatus and substrate processing method | Akio Ui, Hisataka Hayashi, Takeshi Kaminatsui, Norikazu Yamada, Takeshi Ohse +1 more | 2019-08-20 |
| 10297428 | Plasma processing apparatus | Akihiro Yokota, Tatsuro Ohshita, Shu Kusano | 2019-05-21 |
| 10290468 | Electrode for plasma processing apparatus, plasma processing apparatus, plasma processing method and storage medium | Masanobu Honda | 2019-05-14 |