AY

Akihiro Yokota

TL Tokyo Electron Limited: 1 patents #275 of 763Top 40%
📍 Rifu, JP: #90 of 288 inventorsTop 35%
Overall (2019): #553,179 of 560,194Top 100%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10297428 Plasma processing apparatus Shinji Himori, Tatsuro Ohshita, Shu Kusano 2019-05-21