Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388544 | Substrate processing apparatus and substrate processing method | Akio Ui, Hisataka Hayashi, Takeshi Kaminatsui, Shinji Himori, Takeshi Ohse +1 more | 2019-08-20 |
| 10250217 | Method for impedance matching of plasma processing apparatus | Koichi Nagami | 2019-04-02 |