Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388544 | Substrate processing apparatus and substrate processing method | Akio Ui, Takeshi Kaminatsui, Shinji Himori, Norikazu Yamada, Takeshi Ohse +1 more | 2019-08-20 |
| 10381198 | Plasma processing apparatus and plasma processing method | Akio Ui, Kazuhiro Tomioka, Hiroshi Yamamoto, Tsubasa Imamura | 2019-08-13 |
| 10332906 | Dry etching method and method for manufacturing semiconductor device | Kaori Narumiya, Keisuke Kikutani, Akio Ui, Yosuke Sato | 2019-06-25 |