Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10332906 | Dry etching method and method for manufacturing semiconductor device | Hisataka Hayashi, Keisuke Kikutani, Akio Ui, Yosuke Sato | 2019-06-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10332906 | Dry etching method and method for manufacturing semiconductor device | Hisataka Hayashi, Keisuke Kikutani, Akio Ui, Yosuke Sato | 2019-06-25 |