Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490415 | Method of manufacturing 3-dimensional memories including high aspect ratio memory hole patterns | Atsushi Takahashi, Toshiyuki Sasaki | 2019-11-26 |
| 10381198 | Plasma processing apparatus and plasma processing method | Akio Ui, Hisataka Hayashi, Kazuhiro Tomioka, Hiroshi Yamamoto | 2019-08-13 |