Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431433 | Plasma processing apparatus and plasma processing method | Natsumi TORII | 2019-10-01 |
| 10269539 | Plasma processing method | Kumiko Ono, Hiroshi Tsujimoto | 2019-04-23 |
| 10250217 | Method for impedance matching of plasma processing apparatus | Norikazu Yamada | 2019-04-02 |
| 10176971 | Plasma processing apparatus | — | 2019-01-08 |